DEVICE FOR CORRECTING DEFECT OF EMULSION MASK OR THE LIKE

摘要

PURPOSE:To easily remove the defects of the straight and curved patterns of the images of the emulsion mask without intricately constituting the device by shaping a laser beam for removing the defect part by an aperture to comply with the shape of the defect part and irradiating the defect part with this laser beam. CONSTITUTION:The aperture is constituted of two sheets of aperture blades 51, 52 provided with light transmission parts and light shielding parts for shaping the laser beam. Two sheets of the aperture blades 51, 52 are disposed in superposition. In addition, the device has mechanisms 53 to 56 for moving the blades respectively in a vertical direction and a horizontal direction and a mechanism 57 for rotating the projection of the aperture image over the entire part. The shape of the laser beam is shaped by moving the aperture blades 51, 51 and adequately combining the light transmission parts and the light shielding parts. The aperture is produced by the simple constitution in this way.