| 摘要 |
PURPOSE:To detect a small defect accordant with the shape of the termination part of a pattern with no mistake by scanning a detection mask of the termination part in response to the pattern and detecting the pattern termination part. CONSTITUTION:A binarizing circuit 3 converts an input image obtained by scanning and reading a check subject pattern via a photoelectric transducer scanner 1 into a binary image 4. A termination part detecting circuit 5 scans a 1st termination part detection mask having a size and a shape set previously to the image 4 synchronously with the laster scan and outputs a detection signal 6. Then a termination part checking circuit 7 scans a 2nd termination part detection mask which is smaller than the 1st mask by a designated size and detects a termination defect when a point that is not detected in the pattern is included inside. Thus even a minute defect can be detected with no mistake with use of a termination part detection mask accordant with the shape of the pattern termination part. |
