发明名称 CHARACTERISTIC STABILIZING METHOD FOR PIEZOELECTRIC ACTUATOR
摘要 PURPOSE:To prevent a device from being mechanically destroyed and diminish the drift of displacement at the time of using the device by applying the voltage of electric field or stronger, to the piezoelectric element of an actuator for a fixed time before the actuator to be operated with the piezoelectric element is used. CONSTITUTION:A plurality of planar piezoelectric pieces are laminated and a piezoelectric element 1 is formed. At both the ends of the element 1, slenderly compressed T-shaped hinges 2 are jointed, and the displacement of the element 1 is transmitted to the hinges 4 of a substrate 3. The substrate 3 is fixed in a fitting hole 3a, and a pair of lever arms 5 are operated around the fulcrums of a pair of the hinges 4, and displacements at the tips of the lever arms 5 are enlarged. At the tips of the lever arms 5, a beam 6 as an operating element is held in between with rivets 7, and when voltage is applied to the piezoelectric element 1 through a lead terminal 8, then maximum displacement is generated in the central section of the beam 6. Before an actuator is used, the sine wave of 100Hz from 0V to 150V at maximum is applied to the piezoelectric element 1, 10,000 times. As a result, the piezoelectric element is prevented from being destroyed, and the drift of the displacement is reduced.
申请公布号 JPH0398478(A) 申请公布日期 1991.04.24
申请号 JP19890236441 申请日期 1989.09.11
申请人 NEC CORP 发明人 NISHIZAWA TAKESHI
分类号 H02N2/00;H01L41/09 主分类号 H02N2/00
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