Total reflection X-ray fluorescence apparatus.

摘要

A total reflection X-ray fluorescence apparatus comprises a base material (6) having an optically flat surface for totally reflecting X-rays radiated at a small glancing angle, a first detector (13) such as an SSD for detecting fluorescent X-rays emerging from a specimen (7) located near the optically flat surface of the base material (6) and a second detector (11) such as a scintillation counter for detecting an intensity of an X-rays coming from the base material (6).