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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0397249(A)
申请公布日期
1991.04.23
申请号
JP19890234911
申请日期
1989.09.11
申请人
TOSHIBA CORP
发明人
HARA SHINICHI;SAKURAI HISAHARU
分类号
H01L23/34;H01L21/60
主分类号
H01L23/34
代理机构
代理人
主权项
地址
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