摘要 |
PURPOSE:To irradiate an image converting element with X rays without being disturbed by an obstacle and to obtain an image of high resolution by placing an X-ray irradiation source on the side on which a reflection conductive layer of the image converting element is provided, and writing an X-ray image in the image converting element by this X-ray irradiation. CONSTITUTION:An object 34 to be inspected is irradiated with X rays from an X-ray radiation source 32 placed on the side on which a metallic thin film electrode 23 of an X-ray image converting element 30 is provided, and the surface of the metallic thin film electrode 23 is irradiated therewith. In such a way, an object X-ray image is written in a single crystal plate 22 of the image converting element 30. A read-out system is placed on the side on which a transparent electrode 26 of the X-ray image converting element 30 is provided. That is, a light source 36, a polarizer 38, a convex lens 42, a beam splitter 40, and a CCD image pickup element 48 of a CCD camera 46 are placed. Therefore, a write part and a read-out part are separated completely, and a structural interference of an X-ray image write system and a read-out optical system is avoided effectively.
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