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发明名称
MICROWAVE PLASMA GENERATING DEVICE
摘要
申请公布号
JPH0395899(A)
申请公布日期
1991.04.22
申请号
JP19890231741
申请日期
1989.09.08
申请人
HITACHI LTD
发明人
OKAMOTO YUKIO
分类号
H05H1/30;H05H1/46
主分类号
H05H1/30
代理机构
代理人
主权项
地址
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