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发明名称
EXTERNAL APPEARANCE INSPECTION APPARATUS
摘要
申请公布号
JPH0394443(A)
申请公布日期
1991.04.19
申请号
JP19890232202
申请日期
1989.09.06
申请人
MITSUBISHI ELECTRIC CORP
发明人
MORINAGA KAZUNORI
分类号
G01N21/88;G01N21/93;G01N21/956;H01L21/66
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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