发明名称 Crystal growth method.
摘要 A crystal growth method comprises: applying a crystallization treatment on an amorphous film, injecting ions of the constituent material of the film into the film applied with the crystallization treatment provided with a mask to form a first region and a second region made amorphous by the ion injection, and growing a crystal from the first region to the second region by solid phase growth.
申请公布号 EP0422864(A1) 申请公布日期 1991.04.17
申请号 EP19900310993 申请日期 1990.10.08
申请人 CANON KABUSHIKI KAISHA 发明人 YONEHARA, TAKAO
分类号 C30B1/10;C30B1/02;H01L21/20;H01L21/324;H01L21/84 主分类号 C30B1/10
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