| 摘要 |
PURPOSE:To make possible a stable bonding regardless of the direction of a lead and the rigidity of the lead by a method wherein a timing of ultrasonic oscillation and an ultrasonic oscillation output are controlled. CONSTITUTION:A bonding tool 3 is made to vibrate by ultrasonic oscillation means 1, 14 and 15 and after the vibration of this tool 3 becomes a vibration of an amplitude larger than a proper amplitude for a bonding, this tool 3 is made to land on a lead 20b. Moreover, a wire 4 supported by the tool 3 is made to bond on the lead 20b in a state that it is made to vibrate in the proper amplitude. That is, as the tool 3 is landed on the lead 20b in a state that the amplitude of the tool 3 is larger than the proper amplitude for a bonding, the rise of ultrasonic vibration of the tool 3 to the lead 20b becomes infinite and the lead 20b can not follow up the vibration of the tool 3 and performs a relative movement. Thereby, a stable bonding can be made possible regardless of the direction of the lead and the rigidity of the lead. |
