| 摘要 |
PURPOSE:To shorten the time of the conversion from original pattern data to a comparison signal by converting basic pattern data into a comparison signal and storing it, and converting variable data by each unit quantity of the comparison signal at the time of comparative inspection. CONSTITUTION:The basic pattern data written on a magnetic tape 1 are developed into basic comparison signal units at an original data conversion part 3 and the comparison signal D1 is stored in a storage part 4. The variable pattern is stored on a magnetic tape 2 in the form of a bit map consisting of unit patterns 0 and 1. Further, the real pattern of the reticle 6 on an X-Y stage 5 is passed through a photoelectric conversion part 8 from an optical system 7 to obtain a unit comparison signal D3. The magnetic tape (variable data) 2 is converted into comparison data D2 by a conversion part 3 one unit of unit area scanned by the stage 5 before and put together by a composition part 9 with the unit data D1 of the pattern data and the composite data is compared by a comparison part 10 with the unit comparison signal D3 of the real pattern and outputted to the outside 11. Consequently, the time required to convert the original pattern data into the comparison signal can be shortened. |
