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发明名称
MANUFACTURE OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH0384947(A)
申请公布日期
1991.04.10
申请号
JP19890222188
申请日期
1989.08.28
申请人
MATSUSHITA ELECTRIC WORKS LTD
发明人
TAKAKURA NOBUYUKI
分类号
H01L21/76;H01L21/205;H01L21/763
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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