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发明名称
MANUFACTURE OF SEMICONDUCTOR
摘要
申请公布号
JPH0385741(A)
申请公布日期
1991.04.10
申请号
JP19890221548
申请日期
1989.08.30
申请人
SUMITOMO BAKELITE CO LTD
发明人
KAWADA MASAKAZU;MATSUI YASUO
分类号
H01L21/607;H01L21/60
主分类号
H01L21/607
代理机构
代理人
主权项
地址
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