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发明名称
PLASMA PRODUCER
摘要
申请公布号
JPH0383334(A)
申请公布日期
1991.04.09
申请号
JP19890221137
申请日期
1989.08.28
申请人
TOKYO ELECTRON LTD
发明人
NISHIMURA EIICHI
分类号
H01L21/302;H01L21/3065;H01L21/31
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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