发明名称 |
IMAGE REVERSAL NEGATIVE WORKING PHOTORESIST |
摘要 |
A process for converting a normally positive working photosensitive composition to a negative working composition. One forms a composition containing an alkali soluble resin, a 1,2 quinone diazide-4-sulfonyl compound and an acid catalyzed crosslinker in a solvent mixture. After drying and imagewise exposing, the composition is baked and developed to produce a negative image. |
申请公布号 |
CA1282627(C) |
申请公布日期 |
1991.04.09 |
申请号 |
CA19860515742 |
申请日期 |
1986.08.12 |
申请人 |
SPAK, MARK A. |
发明人 |
SPAK, MARK A.;DURHAM, DANA;MAMMATO, DONALD;JAIN, SANGYA |
分类号 |
G03C1/485;G03F7/004;G03F7/022;G03F7/039;G03F7/38;H01L21/027 |
主分类号 |
G03C1/485 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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