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发明名称
SEMICONDUCTOR INTEGRATION CIRCUIT UNIT AND MANUFACTURING METHOD
摘要
申请公布号
JPH0379059(A)
申请公布日期
1991.04.04
申请号
JP19890215545
申请日期
1989.08.22
申请人
HITACHI LTD
发明人
OOGAYA KAORU
分类号
H01L21/3205;H01L21/82;H01L23/485;H01L23/52;H01L23/522;H01L23/528
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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