| 摘要 |
<p>PURPOSE:To keep two or more boards clean and the treatment temperature of a following process constant by a method wherein air is taken in through an air intake and sent, which is heated, cleaned, and made to flow downward, the flow rate and the temperature of air are detected and controlled as required by control. CONSTITUTION:For instance, seven half-dried boards 20 are housed and kept in board placing means 8 of a board transfer box 1, and the box 1 is closed by sliding a lid 9. The, air speed and temperature at a drive control circuit section 11 are detected, and the drive control circuit section 11 is so set at to operate when the speed and the temperature of air reach to required values, and when a main switch is turned ON, the blower of a blowing means 3 is rotated and concurrently a current is fed to the electric heater of a heating means 4, warm air is made to blow off into a board housing space located below passing through an HEPA filter of an air cleaning means 5. Moreover, air is taken in through an air intake located at the rear of the box 1. Heated air is made to flow downward as a cleaned air flow 15 of constant temperature passing through gaps at the front and the rear of the board 20 and then discharged outside through a cutout 91 provided to the lower part of the lid 9. The board transfer box 1 is brought by hand to the site of a following process and placed on an up-down table 50 as it is in operation keeping board 20 housed in it.</p> |
