APPARATUS AND METHOD FOR MEASURING MAGNETIC FORCE

摘要

PURPOSE: To resolve the magnetic field in a sample in high resolution by measuring the deflection of chip induced by Lorentz's force with a scanning microscope. CONSTITUTION: A proper a.c. voltage signal is applied to Z-axis direction piezoelectric driving mechanism to vibrate a chip. A frequencyω2 is not in the number of resonant vibrations of chip, andω2 is selected in a manner that any detected accounting frequency or difference frequency may become the resonant frequency of chip. When the movement of chip is detected by the difference frequency between two kinds of movement applied by an optical heterodyne interferometer and the sum frequency (ω1±ω2 ), the mutual action only between the chip 40 and sample 46 is detected and measured. Then, as shown in a diagram, one interferometer capable of measuring the laser phase change and/or two interferometers for measuring respectively the movement in one direction of both movement axes measure the movement of chip.