THIN FILM FORMING DEVICE,申请号JP19890201765-传众专利搜索

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发明名称	THIN FILM FORMING DEVICE
摘要
申请公布号	JPH0368765(A)	申请公布日期	1991.03.25
申请号	JP19890201765	申请日期	1989.08.03
申请人	RICOH CO LTD	发明人	SATO TATSUYA;KINOSHITA MIKIO;OTA WASABURO
分类号	C23C14/32	主分类号	C23C14/32
代理机构		代理人
主权项
地址

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