HIGH-PRESSURE OXIDATION FURNACE,申请号JP19890206202-传众专利搜索

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发明名称	HIGH-PRESSURE OXIDATION FURNACE
摘要
申请公布号	JPH0369120(A)	申请公布日期	1991.03.25
申请号	JP19890206202	申请日期	1989.08.08
申请人	NEC YAMAGATA LTD	发明人	SEIWA AKINOBU
分类号	H01L21/31	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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