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发明名称
VAPOR GROWTH METHOD FOR COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPH0369590(A)
申请公布日期
1991.03.25
申请号
JP19890207274
申请日期
1989.08.10
申请人
FUJITSU LTD
发明人
AOKI OSAMU
分类号
C30B25/18;C30B29/40;H01L21/205
主分类号
C30B25/18
代理机构
代理人
主权项
地址
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