发明名称 |
Compact specimen processing station. |
摘要 |
<p>The present invention is a compact specimen processing station (10) that processes vertically oriented specimens. Specimen storage, transport, and inspection components (26,28, and 30) are all mounted to a vibration-damped support structure (14) and are designed to handle specimens (34) positioned with a generally vertical orientation. The station is designed to minimize undesirable specimen motion and contamination caused by an operator (42). A specimen processing station (10) that performs inspection functions is equipped with a microscope (32) and a display monitor (36) that provide a real image and a video image, respectively, of a microscopic region of the specimen under inspection. The station is equipped with failsafe mechanisms (176 and 182) that prevent the dropping of a specimen during an electrical power failure or a vacuum pressure loss.</p> |
申请公布号 |
EP0418018(A2) |
申请公布日期 |
1991.03.20 |
申请号 |
EP19900309896 |
申请日期 |
1990.09.10 |
申请人 |
KENSINGTON LABORATORIES, INC |
发明人 |
FILIPSKI, PAUL S.;BACCHI, PAUL E. |
分类号 |
G01R31/26;H01L21/00;H01L21/66;H01L21/677 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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