发明名称 Compact specimen processing station.
摘要 <p>The present invention is a compact specimen processing station (10) that processes vertically oriented specimens. Specimen storage, transport, and inspection components (26,28, and 30) are all mounted to a vibration-damped support structure (14) and are designed to handle specimens (34) positioned with a generally vertical orientation. The station is designed to minimize undesirable specimen motion and contamination caused by an operator (42). A specimen processing station (10) that performs inspection functions is equipped with a microscope (32) and a display monitor (36) that provide a real image and a video image, respectively, of a microscopic region of the specimen under inspection. The station is equipped with failsafe mechanisms (176 and 182) that prevent the dropping of a specimen during an electrical power failure or a vacuum pressure loss.</p>
申请公布号 EP0418018(A2) 申请公布日期 1991.03.20
申请号 EP19900309896 申请日期 1990.09.10
申请人 KENSINGTON LABORATORIES, INC 发明人 FILIPSKI, PAUL S.;BACCHI, PAUL E.
分类号 G01R31/26;H01L21/00;H01L21/66;H01L21/677 主分类号 G01R31/26
代理机构 代理人
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