MOLECULAR BEAM GENERATION APPARATUS,申请号JP19890202164-传众专利搜索

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发明名称	MOLECULAR BEAM GENERATION APPARATUS
摘要
申请公布号	JPH0365591(A)	申请公布日期	1991.03.20
申请号	JP19890202164	申请日期	1989.08.03
申请人	NEC CORP	发明人	NEGISHI HITOSHI
分类号	C30B23/08;H01L21/203	主分类号	C30B23/08
代理机构		代理人
主权项
地址

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