发明名称 Apparatus for synthetic diamond deposition including curved filaments and substrate cooling means.
摘要 <p>Diamond is deposited by chemical vapor deposition on two parallel substrates, by means of a plurality of filaments between said substrates. The substrates and filaments are in vertical configuration and the filaments are prestressed to curve in a single plane parallel to the substrates, to allow for thermal expansion and expansion caused by filament carburization. The apparatus includes at least one and preferably two heat sinks to maintain substrate temperature in the range of 900-1000 DEG C, for optimum rate of diamond deposition.</p>
申请公布号 EP0417434(A1) 申请公布日期 1991.03.20
申请号 EP19900114049 申请日期 1990.07.23
申请人 GENERAL ELECTRIC COMPANY 发明人 ANTHONY, THOMAS RICHARD;DEVRIES, ROBERT CHARLES;ENGLER, RICHARD ALLEN;ETTINGER, ROBERT HELMUT;FLEISCHER, JAMES FULTON
分类号 C04B41/87;C23C16/26;C23C16/27;C23C16/44;C23C16/458;C23C16/46;C30B25/10;C30B29/04 主分类号 C04B41/87
代理机构 代理人
主权项
地址