| 摘要 |
PURPOSE:To quickly synthesize highly purified diamond by using specific raw material gas in production of diamond with vapor phase method. CONSTITUTION:A raw material gas containing carbon compound having oxygen atom and halogen atom in a molecule is excited and resultant plasma gas is brought into contact with a base material. For instance, carbonyl halide such as phosgene (COCl2), oxalyl chloride [(COCl)2], carbonyl bromide (COBr2), carbonyl fluoride (COF2) or carbonyl iodide fluoride (COIF), or chlorocarbonate such as methyl chlorocarbonate, ethyl chlorocarbonate or propyl chlorocarbonate is exemplified as said raw material gas. Among said compounds, carbonyl halide, especially phosgene is preferable. |
