METHOD AND DEVICE FOR SYNTHESIZING CARBON FILM

摘要

PURPOSE:To form a carbon film on the surface of an org. photosensitive body layer by trapping the ions in plasma by a meshed electrode and irradiating a substrate with a gas contg. active species at the time of irradiating the substrate with the gaseous hydrocarbon converted to plasma. CONSTITUTION:The gaseous hydrocarbon flowing from a gas inlet 4a into a vacuum vessel 1 is converted to the plasma by using a plasma generating means 12. The meshed electrode 8 and the substrate 7 on the downstream side thereof are disposed in the flow route of this plasma and the circumference of the substrate 7 is coated with the electrode 8. The pressure on the upstream side of the above-mentioned substrate 7 is set higher by >=11 digit than the pressure on the downstream side. Potential is impressed to the electrode 8 by a voltage impressing means 6 simultaneously therewith and the ions in the plasma are removed. The substrate 7 is irradiated with the gas contg. the active species obtd. as a result thereof, by which the carbon film is obtd. thereon.