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发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH0364460(A)
申请公布日期
1991.03.19
申请号
JP19890198847
申请日期
1989.07.31
申请人
HITACHI LTD
发明人
KAMEI MITSUHIRO
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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