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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0360137(A)
申请公布日期
1991.03.15
申请号
JP19890194076
申请日期
1989.07.28
申请人
HITACHI LTD
发明人
ABE HIRONOBU;TSUNODA SHIGEHARU;SATO MASAAKI;KANEDA AIZO;IZUMI AKIYA
分类号
H01L21/56;H01L23/08
主分类号
H01L21/56
代理机构
代理人
主权项
地址
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