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发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH0356672(A)
申请公布日期
1991.03.12
申请号
JP19890190981
申请日期
1989.07.24
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
SUEMITSU TOSHIYUKI;YOKOYAMA MASAHIDE;KAWA HIDETOSHI
分类号
C23C14/54
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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