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发明名称
VERTICAL HEAT TREATMENT FURNACE
摘要
申请公布号
JPH0354821(A)
申请公布日期
1991.03.08
申请号
JP19890189877
申请日期
1989.07.21
申请人
TOSHIBA CERAMICS CO LTD
发明人
MORISHIMA KAZUHIRO;SAKAI YUICHI
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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