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经营范围
发明名称
MOVING STAGE
摘要
申请公布号
JPH0353191(A)
申请公布日期
1991.03.07
申请号
JP19890188087
申请日期
1989.07.20
申请人
TOKYO ELECTRON LTD
发明人
SUZUKI MASARU
分类号
G12B5/00;H01L21/68
主分类号
G12B5/00
代理机构
代理人
主权项
地址
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