| 摘要 |
<p>PURPOSE:To obtain the subject composition for fine processing, containing an alkali-soluble phenolic resin, quinone diazide compound and a specific compound, useful for producing semiconductor elements, magnetic bubble memory elements, integrated circuits, etc. CONSTITUTION:The objective composition containing (A) an alkali-soluble phenolic resin (e.g. an addition-condensation reaction product of phenols with aldehydes), (B) a quinone diazide compound (e.g. 1,2-benzoquinone diazide-4- sulfonic acid ester) and (C) a compound expressed by the formula (R1 to R4 are alkyl, aryl, aralkyl, alkoxy, nitro, halogen or alkenyl) [e.g. 2-(2'- hydroxyphenyl)-benzotriazole].</p> |
