| 摘要 |
PURPOSE:To lower reflectivity by applying a liquid contg. a specific silanol compd. onto a substrate, then heating the substrate. CONSTITUTION:The liquid contg. the silanol compd. expressed by formula I is applied on the substrate and is calcined by heating, by which the above- mentioned film is formed. In the formula, R is at least one kind of hydrogen, alkyl group and alkoxy group in the case of n=0 to 4, nnot equal to 0 and n<=2 when R is hydrogen. For example, the silanol group is expressed by Si(OH)4, HnSi (OH)4-n(n<=2), (OR')nSi(OH)4-n(OR': alkoxy group, n=1 to 4), R'nSi(OH)4-n(R': alkyl group, n=1 to 4). The low reflecting film having the excellent efficiency is obtd. in this way. |
