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发明名称
MANUFACTURE OF SOI SUBSTRATE
摘要
申请公布号
JPH0350817(A)
申请公布日期
1991.03.05
申请号
JP19890187984
申请日期
1989.07.19
申请人
FUJITSU LTD
发明人
ARIMOTO YOSHIHIRO
分类号
H01L21/02;H01L27/12
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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