| 摘要 |
PURPOSE:To inhibit distortion and deformation during sintering and to obtain a sintered body having high heat conductivity by mixing a reduced and nitrided powder of Al with a nitrided powder of Al in different particle sizes in a specified ratio and carrying out molding and sintering at a specified temp. in a nitrogen atmosphere. CONSTITUTION:AlN powder obtd. by mixing reduced and nitrided powder of Al having <=2mum average particle size with a nitrided powder of Al contg. >=30wt.% particles having >=6mum particle size in (1:9)-(6:4) weight ratio is used as to powdery starting material for an AlN sintered body. The AlN powder is mixed with a sintering aid and molded into a green sheet, etc. This molded body is sintered at 1,650-1,850 deg.C in a nitrogen atmosphere and cooled. |
