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发明名称
LIQUID EPITAXIAL CRYSTAL DEPOSITION DEVICE
摘要
申请公布号
JPH0348432(A)
申请公布日期
1991.03.01
申请号
JP19890182423
申请日期
1989.07.17
申请人
FUJITSU LTD
发明人
HIROTA KOJI;TSUCHIDA HIROYUKI;YOSHIDA YUKIHIRO
分类号
H01L21/208;H01L21/368
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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