MANUFACTURE OF SEMICONDUCTOR SUBSTRATE,申请号JP19890183361-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	JPH0346315(A)	申请公布日期	1991.02.27
申请号	JP19890183361	申请日期	1989.07.14
申请人	FUJITSU LTD	发明人	MIYAJIMA MOTOMORI
分类号	H01L21/02;H01L27/12	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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