FORMING METHOD FOR MICRO PATTERN,申请号JP19890180788-传众专利搜索

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发明名称	FORMING METHOD FOR MICRO PATTERN
摘要
申请公布号	JPH0344926(A)	申请公布日期	1991.02.26
申请号	JP19890180788	申请日期	1989.07.12
申请人	SHARP CORP	发明人	IMAE KAZUYOSHI;NAKAMURA TSUNEO;DEGUCHI HARUHIKO
分类号	G11B5/31;H01L21/302;H01L21/3065	主分类号	G11B5/31
代理机构		代理人
主权项
地址

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