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发明名称
Verfahren zur Herstellung von Masken
摘要
申请公布号
DE1521524(A1)
申请公布日期
1969.09.11
申请号
DE19641521524
申请日期
1964.05.06
申请人
TELEFUNKEN PATENTVERWERTUNGSGESELLSCHAFT MBH
发明人
BERTSCH,DR.LUDWIG
分类号
C23C14/04;G03F1/20
主分类号
C23C14/04
代理机构
代理人
主权项
地址
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