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发明名称
A MANUFACTURING METHOD IN A SEMICONDUCTOR DEVICE
摘要
申请公布号
KR910001191(B1)
申请公布日期
1991.02.25
申请号
KR19860009952
申请日期
1986.11.25
申请人
TOSHIBA CORP.
发明人
NOGUJJI DATSUO
分类号
H01L21/28;H01L21/285;H01L21/768;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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