发明名称 MANUFACTURE OF THICK FILM ELECTRIC PARTS
摘要 PURPOSE: To reduce the halt time for the furnace repair to increase the production power by holding a paste and surface composite material in specified temp. range in an inert gas atmosphere and baking them in a high-temp. zone of the furnace added with water of specified ppm. CONSTITUTION: A paste and surface composite material contained in a furnace of 850-1000 deg.C are held in an inert gas, e.g. N atmosphere and the system is set, so as to take a time of 10-30min for all process steps according to the temp. rise and cooling rate of components, wherein total time is 1-7min at a baking temp. of 850-1000 deg.C. The furnace uses W filament quartz lamps, emitting radiation at 4000-4500Å. Water is added 100-3000ppm to a high temp. or pre-heating zone. The pre-heating zone contains, e.g. O to 500ppm or less and high-temp. zone contains O to 1000ppm or less. This reduces the halt time of the furnace for its repair for increasing the production power.
申请公布号 JPH0340485(A) 申请公布日期 1991.02.21
申请号 JP19880239552 申请日期 1988.09.24
申请人 AIR PROD AND CHEM INC 发明人 EDOWAADO ANDORIYUU HEITATSUKU JIYUNIA;DEBITSUDO ROBAATO TATSUSHIYURAA;UORUTAA FURANSHISU EKUSUTO
分类号 C04B35/64;H01L21/70;H05K3/12 主分类号 C04B35/64
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