| 摘要 |
PURPOSE:To enhance a laser device in output by a method wherein an auxiliary electrode is arranged in a discharge space, a certain discharge voltage is applied to a primary electrode, and then a pulse voltage whose polarity is opposite to that of the discharge voltage is applied to the auxiliary electrode so as to temporarily enhance the electric field of the discharge space in intensity. CONSTITUTION:When the discharge voltage of a discharge capacitor 13 rises and a voltage between primary electrodes 4a and 4b reaches to a constant voltage Vc close to the withstand voltage of a discharge space C, a pulse voltage Vp of reverse polarity is applied to an auxiliary electrode 16 from a pulse generator 14 through the intermediary of an ionizing gap 15. Then, an electric field gradient of spaces C1 and C2 becomes larger than that when the pulse voltage Vp is not applied. By this setup, the discharge gap 15 starts discharging, the voltage Vp of reverse polarity is applied to the auxiliary electrode 16, and ionized electrons are generated through ultraviolet rays generated with the discharge of the gap 15. The electrons concerned are multiplied in the discharge spaces C1 and C2 through the intermediary of an avalanche mechanism, a spacer between the primary electrodes 4a and 4b becomes conductive, and a large discharge current flows through the spaces C1 and C2 from the capacitor 13. By this constitution, a gas laser of this design can be enhanced in laser output. |
