MEASURING APPARATUS OF LENGTH BY ELECTRON BEAM AND CORRECTING METHOD OF DISTORTION OF DEFLECTION OF ELECTRON BEAM,申请号JP19890177357-传众专利搜索

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发明名称	MEASURING APPARATUS OF LENGTH BY ELECTRON BEAM AND CORRECTING METHOD OF DISTORTION OF DEFLECTION OF ELECTRON BEAM
摘要
申请公布号	JPH0341308(A)	申请公布日期	1991.02.21
申请号	JP19890177357	申请日期	1989.07.10
申请人	HITACHI LTD	发明人	SASAKI MINORU;SATO SEISHIRO
分类号	G01B15/00;H01J37/147	主分类号	G01B15/00
代理机构		代理人
主权项
地址

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