| 摘要 |
PURPOSE:To form a good photoconductive layer easily by mixing >=2 kinds of one of the respective silicon compds. consisting of two specific formulas at specific ratios and mixing these with materials contg. carbon atoms thereby forming a raw material for formation of photoconductive layers. CONSTITUTION:A raw material is constituted of a material contg. carbon atoms as constituting atoms and the compds. expressed by the A formula SinH2n+2, B formula SimHlXk (n, m, k are positive integers, l is 0 or a positive integer, l+k=2m+2, X is halogen atom). At least two kinds are contained for either one of the compds. expressed by the A formula or the B formula, so that with respect to the compd. of the min. order of (n) or (m), for example, Si2H6, the compd. of (n) or (m) of higher order than this, for example, Si3H8 is contained at >=1vol%. The raw material for introduction of carbon atoms is, for example, methane, etc., and is mixed at about <=5vol% based on the vol. of the A formula and the B formula compds. The raw material is introduced in a decreased pressure deposition chamber in a gaseous state, and electric discharge is caused therin, whereby a photoconductive layer is formed on a substrate. |
