| 摘要 |
PURPOSE:To eliminate occurrence of attack and carburizing phenomena caused by melt of metal even by letting graphite material exist at high temperature for a long time by providing a graphite material with a coating film of thermally decomposed carbon having specific physical properties. CONSTITUTION:A coating film of thermally decomposed carbon having the value of ratio (I1,360/I1,580) of peak height at 1360cm<-1> band and peak height at 1,580cm<-1> band in Raman scattering spectrum of >=0.1 is formed on a graphite material by thermal CVD method. The thermally decomposed carbon has excellent corrosion resistance to plasma of Freon gas, etc., and is usable for electrodes to be used in etching process in semiconductor production process. |
