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发明名称
PHOTOLACKENTFERN-VERFAHREN.
摘要
申请公布号
DE3676715(D1)
申请公布日期
1991.02.14
申请号
DE19863676715
申请日期
1986.01.09
申请人
MICROSI, INC. (N.D.GES.D.STAATES DELAWARE), PHOENIX, ARIZ., US
发明人
WEST, PAUL RICHARD, BALLSTON SPA NEW YORK 12020, US
分类号
G03C11/00;G03F7/26;G03F7/42;H01L21/027;H01L21/30;(IPC1-7):G03F7/26
主分类号
G03C11/00
代理机构
代理人
主权项
地址
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