SELF-SUPPORTING THIN-FILM FILAMENT DETECTOR, PROCESS FOR ITS MANUFACTURE AND ITS APPLICATIONS TO GAS DETECTION AND GAS CHROMATOGRAPHY

摘要

21 A filament type sensor for determining a static or dynamic characteristic of a surrounding environment comprises a resistive element adapted to be heated in the environment by the passage of an electric current. An interface area is adapted to react with the environment in a physico-chemical process influencing an electronic characteristic of the interface area according to the characteristic to be determined. The sensor comprises a supporting wafer through which there is formed at least one hole and at least one filament including the resistive element. The filament comprises one or more thin films and has a central portion situated in the hole and at least two end portions by which the central portion is connected to the supporting wafer.