| 摘要 |
PURPOSE:To return the pressure in an outer casing to the initial pressure without a shock by storing a substance which changes into gas-liquid-solid depending on temperature in a vacuum receptacle having an outer casing proof against low pressure (or high pressure) processing, a pressure decreasing (pressure increasing) line and a pump. CONSTITUTION:A pressure decreasing pump 2 is installed on an outer casing 1 retaining the vacuum for processing, and a valve 3 for keeping the vacuum when the pump 2 is stopped is provided. A pipe 5 for introducing gas into the decompressed outer casing 1 to cancel the vacuum is connected to the outer casing, and a valve 6 is disposed in the midway of the pipe. In the thus constructed vacuum device, a container 10 for storing a pressure control substance 9 is installed in a part of the outer casing 1, and the temperature of the substance 9 can be controlled by a temperature control device 11. If the substance 9 is water, for example 1 atm is let have in 22.4l with molecular weight 18, so that about 2cc is stored in the outer casing 1 with 2l. In the case of returning the pressure in the outer casing 1 to the initial state, the steam pressure is maintained by controlling the temperature of the substance 9. |
