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发明名称
摘要
申请公布号
JPH039610(B2)
申请公布日期
1991.02.08
申请号
JP19850245534
申请日期
1985.10.30
申请人
MITSUBISHI ELECTRIC CORP
发明人
SASAKI HAJIME
分类号
H01L31/04;H01L21/205;H01L21/263;H01L21/31
主分类号
H01L31/04
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