摘要 |
PURPOSE:To execute a sintering operation in the air or in a reducing atmosphere at 850 to 950 deg.C and to enhance an acid-resistant property and an alkali- resistant property by a method wherein a raw-material powder composed of a specific inorganic powder and of a glass powder containing ZrO2 is sintered. CONSTITUTION:A mixture composed of the following is sintered: 20 to 65wt.% of at least one kind of inorganic powder which is selected from a group of an alumina powder, a mullite powder, a quartz powder and a cordierite powder; 80 to 35wt.% of a glass powder containing ZrO2, or preferably a glass powder whose main components are SiO2, Al2O3, B2O3, MgO, CaO, BaO and ZrO2. That is to say, a glass composition such as the alumina powder, the mullite powder or the like whose sintering property is high and whose acid-resistant property after a sintering operation becomes high is used. Thereby, it is possible to obtain a dense ceramic substrate which can be sintered at a low temperature of about 900 deg.C and whose acid-resistant property and alkali-resistant property have been enhanced. |